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Material Specifications
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CoreRes® is perfluoroelastomer which has been successfully demonstrated for last 10 years. CoreRes® shows excellent thermal resistance, plasma resistance, and also outstanding physical properties. CoreRes® will achieve more than expected of customers by providing the best product which is composed by nanoparticulate in the microstructur line process.

CoreRes® KI-300

CoreRes® KI-300 is Perfluoroelastomer which is applying Nano-size filler for minimizing particle generation and contamination during the process. The material offers outstanding thermal stability, and it can be used in both static and dynamic sealing applications because of its superior elastic recovery and mechanical strength properties in high temperature process.KI-300 has also outstanding plasma resistance for Cleaning gas(NF3, 02 etc) and reactive gas. It suits for Dry etching, PVD, CVD, Diffusion process. A maximum continuous service temperature of 320 ℃ is suggested.

CoreRes® SL-201

CoreRes® SL-201 is perfluoroelastomerwith nano-filler composition, it offers low particle generation. It has specially developed for Dry etching, PVD, CVD, Diffusion, etc process with excellent plasma resistance for cleaning gas (NF3, O2, etc) and reactive gas.CoreRes®SL-201 maintains the stable mechanical properties in high temperature and plasma,and also well suited for both static and dynamic sealing application. A maximum service temperature of 280℃is suggested.

CoreRes® IN-107

CoreRes® IN-107 is made with Nano-filler for minimize particle generation. It has excellent plasma resistance for cleaning gas(O2, NF3 etc) and reactive gas to be used in dry etching, PVD, CVD, Diffusion process. The maximum service temperature is 230°C and the physical properties is stable in the high temperature and plasma condition to be used.

CoreRes® EL-270

CoreRes® EL-270 is an upgraded version of perfluoroelastomer (5080) and targeted specially for lower particle generation. It exhibits outstanding thermal stability, excellent performance in HDPCVD, PECVD, SACVD, Etching, Ashing, etc. EL270 has excellent elastic recovery and is well-suited for both static and dynamic sealing applications. (Chamber lid, Gas line, Bonded slit valve, Shower head seal, etc.)
A maximum continuous service temperature of 320°c is suggested.

CoreRes® EL-275FL

CoreRes® EL-275FL is the newest material of perfluoroelastomer (FFKM) and targeted specially for lower particle generation. It exhibits outstanding thermal stability, excellent performance in HDPCVD, PECVD, SACVD, Etching, Ashing, etc. EL-275FL has excellent elastic recovery and is well-suited for both static and dynamic sealing applications. (Chamber lid, Gas line, Bonded slit valve, Shower head etc.)A maximum continuous service temperature of 320°c is suggested.

CoreRes® i475

CoreRes®I-475 is translucent beige compound and the material is specifically designed for high- purity process. It provides excellent mechanical strength properties and outstanding elastic recovery. The material withstands manufacturing process where a variety of corrosive chemicals are used.
A maximum continuous service temperature of 220°c is suggested.

CoreRes® 5080

CoreRes® 5080 is specifically developed for corrosive plasma and a variety of chemical environments. The material offers outstanding thermal stability and lower particle generation. It is targeted for deposition process (HDPCVD, PECVD, SACVD) Etching, Ashing, etc. It can be used both static and dynamic sealing applications because of its superior elastic recovery and mechanical strength properties.
A maximum continuous service temperature of 300°c is suggested.

CoreRes® 5080UP

CoreRes® 5080UP has excellent resistance in process which is harsh plasma and a variety of chemical environments. Especially it exhibits outstanding performance in O2, NF3 plasma process. 5080UP is semitransparent violet color with no metal fillers. It offers long life time with low contamination, excellent compression set properties and is widely used in Semiconductor, FPD manufacturing application.
A maximum continuous service temperature of 280°c is suggested.

CoreRes® F-972

CoreRes® F-972 has excellent compression set property and is well-suited for both static and dynamic sealing application. It shows better chemical and heat resistance compared to Viton.

CoreRes® F-575(VITON)

CoreRes® F-575 has good resistance to solvent and various kinds of oil. It is widely used in semiconductor and FPD industries. It is not suitable in process where amine, ammonia, and hot Acid is used. Continuous service temperature of 200°C is suggested.